Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5726413 | Apparatus for generating a plasma for processing substrates | Ulrich Baenziger, Gerold Neumann | 1998-03-10 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5726413 | Apparatus for generating a plasma for processing substrates | Ulrich Baenziger, Gerold Neumann | 1998-03-10 |