| 6491808 |
Electrolytic etching method, method for producing photovoltaic element, and method for treating defect of photovoltaic element |
Hirofumi Ichinose, Ippei Sawayama, Tsutomu Murakami, Masaya Hisamatsu |
2002-12-10 |
| 6472594 |
Photovoltaic element and method for producing the same |
Hirofumi Ichinose, Akio Hasebe, Tsutomu Murakami, Satoshi Shinkura |
2002-10-29 |
| 6221685 |
Method of producing photovoltaic element |
Hirofumi Ichinose, Tsutomu Murakami |
2001-04-24 |
| 6051116 |
Etching apparatus |
Hirofumi Ichinose, Ippei Sawayama, Akio Hasebe, Tsutomu Murakami, Masaya Hisamatsu +1 more |
2000-04-18 |
| 6051778 |
Electrode structure, process production thereof and photo-electricity generating device including the electrode |
Hirofumi Ichinose, Akio Hasebe, Tsutomu Murakami, Satoshi Shinkura |
2000-04-18 |
| 6008451 |
Photovoltaic device |
Hirofumi Ichinose, Akio Hasebe, Tsutomu Murakami, Satoshi Shinkura |
1999-12-28 |
| 5993637 |
Electrode structure, electrolytic etching process and apparatus |
Masaya Hisamatsu, Akio Hasebe, Tsutomu Murakami, Hirofumi Ichinose, Satoshi Shinkura |
1999-11-30 |
| 5863412 |
Etching method and process for producing a semiconductor element using said etching method |
Hirofumi Ichinose, Ippei Sawayama, Akio Hasebe, Tsutomu Murakami, Masaya Hisamatsu +1 more |
1999-01-26 |
| 5861324 |
Method for producing photovoltaic element |
Hirofumi Ichinose, Akio Hasebe, Tsutomu Murakami, Satoshi Shinkura |
1999-01-19 |
| 5859397 |
Process for the production of a photovoltaic element |
Hirofumi Ichinose, Akio Hasebe, Tsutomu Murakami, Satoshi Shinkura |
1999-01-12 |
| 5759291 |
Photovoltaic cell and method of making the same |
Hirofumi Ichinose, Akio Hasebe, Tsutomu Murakami, Satoshi Shinkura |
1998-06-02 |
| 5681402 |
Photovoltaic element |
Hirofumi Ichinose, Akio Hasebe, Tsutomu Murakami, Satoshi Shinkura |
1997-10-28 |
