Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6403496 | Method for forming shallow trench isolations | — | 2002-06-11 |
| 6329293 | Method for cleaning a polymer | Song-Ping Tsai | 2001-12-11 |
| 6221785 | Method for forming shallow trench isolations | — | 2001-04-24 |
| 5997589 | Adjustment pumping plate design for the chamber of semiconductor equipment | — | 1999-12-07 |
| 5672241 | Method of forming metal contact holes in semiconductor fabrication | Chieh-Lin Huang | 1997-09-30 |