Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8530801 | Method and apparatus for manufacturing semiconductor wafer | Hirotaka Katou, Kazuhiro Narahara, Hideyuki Matsunaga | 2013-09-10 |
| 7537658 | Method for producing epitaxial silicon wafer | Kazuhiro Narahara | 2009-05-26 |