Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12147374 | Distributed control system and semiconductor inspection apparatus including same | Kazushi YAMASHINA, Takashi Saegusa, Yoshiro Gunji, Tetsuji Ohsawa, Junichi Kitamura +3 more | 2024-11-19 |
| 11343119 | Distributed control system and communication control method therefor | Kazushi YAMASHINA, Terunobu Funatsu, Takashi Saegusa, Masahiro Ohashi, Yoshiro Gunji +3 more | 2022-05-24 |
| 10168208 | Light amount detection device, immune analyzing apparatus and charged particle beam apparatus that each use the light amount detection device | Fujio Onishi, Osamu Tasaki, Hidetsugu TANOUE, Kazuhiro Tanaka | 2019-01-01 |