Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10527927 | Conductive film coated substrate, multilayer reflective film coated substrate, reflective mask blank, reflective mask, and semiconductor device manufacturing method | Kazuhiro Hamamoto | 2020-01-07 |
| 10209614 | Conductive film coated substrate, multilayer reflective film coated substrate, reflective mask blank, reflective mask, and semiconductor device manufacturing method | Kazuhiro Hamamoto | 2019-02-19 |
| 9746762 | Conductive film coated substrate, multilayer reflective film coated substrate, reflective mask blank, reflective mask, and semiconductor device manufacturing method | Kazuhiro Hamamoto | 2017-08-29 |
| 7722998 | Reflective mask blank | Shinichi Ishibashi | 2010-05-25 |
| 7348105 | Reflective maskblanks | Shinichi Ishibashi | 2008-03-25 |