Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11774370 | Apparatus for processing substrate and method for measuring temperature of substrate | Hahn Joo YOON, Chan Ho Hong, Seung Hwan Lee, Oh-Seung Kwon | 2023-10-03 |
| 10985040 | Substrate treatment method and substrate treatment apparatus | Sang Hyun JI, Gun Bum Lee | 2021-04-20 |
| 6607071 | Sealed test chamber for module IC handler | Tae Sung An, Chan Ho Park, Eun Hyoung Seong, Ku Kyong Kim | 2003-08-19 |