Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6229118 | Wafer handling apparatus for transferring a wafer to and from a process chamber | Jae-Pil Kim | 2001-05-08 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6229118 | Wafer handling apparatus for transferring a wafer to and from a process chamber | Jae-Pil Kim | 2001-05-08 |