Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12214491 | Transfer robot for transferring gas container, gas supply cabinet, and gas supply system including the same | Kyeongsup Byeon, Inwook KOO, Dongwon Kim, Minyoung KIM, Yi Jin +4 more | 2025-02-04 |
| 11590460 | Chemical solution evaporation device and substrate processing device including the same | Wonguk Seo, Sungyong Park, Hongju Kim, Ansook Sul, Seok-Won Heo | 2023-02-28 |