Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10763154 | Measurement of flatness of a susceptor of a display CVD chamber | Ying Ma, Shih-Chang Chen, Jin Sun, Rodolfo V. Perez, JR., Stanley Wu | 2020-09-01 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10763154 | Measurement of flatness of a susceptor of a display CVD chamber | Ying Ma, Shih-Chang Chen, Jin Sun, Rodolfo V. Perez, JR., Stanley Wu | 2020-09-01 |