Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11821106 | Semiconductor process chamber including lower volume upper dome | Keum Seok Park, Gyeom Kim, Sun-Jung Kim, Pan-Kwi Park, Jeong Ho Yoo | 2023-11-21 |
| 10790133 | Precleaning apparatus and substrate processing system | Keum Seok Park, Sun-Jung Kim, Pan-Kwi Park, Dong-Suk Shin, Hyun-Kwan Yu +1 more | 2020-09-29 |