Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12431355 | Method and system for forming patterned features on a surface of a substrate using a plasma-enhanced cyclical deposition process | Seunghyun Lee, Hyunchul Kim, Naoki Inoue | 2025-09-30 |
| 12243742 | Method for processing a substrate | Seunghyun Lee, Hyunchul Kim, SeungWoo Choi | 2025-03-04 |
| 12154824 | Substrate processing method | Hyunchul Kim, SeungWoo Choi, WooSik Shin, KiHun Kim | 2024-11-26 |
| 12020934 | Substrate processing method | Seunghyun Lee, Hyunchul Kim, SeungWoo Choi | 2024-06-25 |
| 11658035 | Substrate processing method | Seunghyun Lee, Hyunchul Kim, SeungWoo Choi | 2023-05-23 |