Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12264749 | Flow control equipment and automatic refilling system | Bo Liu | 2025-04-01 |
| 12203312 | System, method, and device for monitoring closed state of cover of exposure machine, medium, and equipment | — | 2025-01-21 |
| 12191177 | Storage system, query system and storage method for reticles, and computer device | — | 2025-01-07 |
| 12117738 | Reticle detection apparatus, reticle detection method, exposure machine and photolithography device | — | 2024-10-15 |
| 12099309 | Wafer processing apparatus and wafer transfer method | — | 2024-09-24 |
| 12070780 | Machine cleaning device | — | 2024-08-27 |
| 12072640 | Cleaning system, exposure machine, and cleaning method | Lulu Fang | 2024-08-27 |
| 11972967 | Wafer processing system, semiconductor-machine automatic leveling apparatus and leveling method thereof | — | 2024-04-30 |
| 11923226 | Conveyor device and semiconductor production equipment | — | 2024-03-05 |
| 11922262 | Photomask inspection system and method | — | 2024-03-05 |
| 11822261 | Wafer edge exposure apparatus, wafer edge exposure method and photolithography device | — | 2023-11-21 |
| 11669015 | Photolithography device and method for monitoring position of a light source in a photolithography device | — | 2023-06-06 |