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Thin-film solar cells and method of making |
Manfred Lohmeyer, Stefan Bauer, Burkhard Danielzik, Nina Freitag |
2006-05-09 |
| 6670543 |
Thin-film solar cells and method of making |
Manfred Lohmeyer, Stefan Bauer, Burkhard Danielzik, Nina Freitag |
2003-12-30 |
| 6177148 |
Plasma CVD system with an array of microwave plasma electrodes and plasma CVD process |
Marten Walther, Burkhard Danielzik, Markus Kuhr, Roland Hochhaus, Hartmut Bauch +3 more |
2001-01-23 |
| 6025013 |
PICVD process and device for the coating of curved substrates |
Martin Heming, Ulrich Lange, Roland Langfeld, Jurgen Otto, Volker Paquet +2 more |
2000-02-15 |
| 5079033 |
Process and apparatus for resin-coating of extrusions |
Stefan Schulz, Berthold H. Kegel |
1992-01-07 |
| 4992665 |
Filamentless magnetron-ion source and a process using it |
— |
1991-02-12 |