Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12287064 | Gas container and deposition system including the same | Sunhye HWANG, Younjoung Cho, Youngha Song, Yonghun Shin, Byungkil Lee +2 more | 2025-04-29 |
| 12183591 | Etching gas compositions, methods of forming micropatterns, and methods of manufacturing semiconductor device | Dohoon Kim, Taehyung Kim, Heejun Park, Handuck Song, Heonjong Jeong +2 more | 2024-12-31 |
| 10883173 | Gas storage cylinder, deposition system, and method of manufacturing semiconductor device | Yeonock Han, Keum Seok Park, Pankwi Park, Jeongho Yoo, Younjoung Cho +4 more | 2021-01-05 |
| 10134583 | Methods of forming a low-k dielectric layer and methods of fabricating a semiconductor device using the same | Sunhye HWANG, Myong Woon Kim, Younjoung Cho, Sang Ick Lee, Sang Yong Jeon +2 more | 2018-11-20 |
| 9460935 | Method for fabricating semiconductor devices | — | 2016-10-04 |