Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10513438 | Method for stabilizing filaments in a chemical vapor deposition reactor | Chad Fero, Aaron D. Rhodes, Jeffrey C. Gum | 2019-12-24 |
| 10494714 | Chuck for chemical vapor deposition systems and related methods therefor | — | 2019-12-03 |
| 9701541 | Methods and systems for stabilizing filaments in a chemical vapor deposition reactor | Chad Fero, Aaron D. Rhodes, Jeffrey C. Gum | 2017-07-11 |
| 9162898 | Purification of trichlorosilane | Bruce Hazeltine, Scott Fahrenbruck | 2015-10-20 |
| 8961689 | Systems and methods for distributing gas in a chemical vapor deposition reactor | — | 2015-02-24 |