Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9222837 | Black silicon-based high-performance MEMS thermopile IR detector and fabrication method | Haiyang Mao | 2015-12-29 |
| 9117949 | Structure and fabrication method of a high performance MEMS thermopile IR detector | Haiyang Mao | 2015-08-25 |