Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7420744 | Ambient environment index of refraction insensitive optical system | David George, Robert Todd Belt | 2008-09-02 |
| 7280275 | High efficiency beam distribution with independent wavefront correction | Ron P. Bevis, John J. Bockman, Greg C. Felix, Terry E. Riener | 2007-10-09 |
| 7158236 | Heterodyne laser interferometer for measuring wafer stage translation | — | 2007-01-02 |