Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5602471 | Angle sensor including angularly spaced sensor units | Michael Muth, August Petersen | 1997-02-11 |
| 5164338 | Method of manufacturing a polycrystalline semiconductor resistance layer of silicon on a silicon body and silicon pressure sensor having such a resistance layer | Rolf U. D. Kobs, Horst Schafer, Heinrich Zeile | 1992-11-17 |
| 5024097 | Pressure sensor comprising a silicon body | Rolf U. D. Kobs | 1991-06-18 |
| 4984046 | Silicon pressure sensor having a resistance layer of polycrystalline semicondutor | Rolf U. D. Kobs, Horst Schafer, Heinrich Zeile | 1991-01-08 |