Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9719164 | Method of manufacturing compound film | Koichiro Iwahori | 2017-08-01 |
| 9352073 | Functional film | Yusuke Taki | 2016-05-31 |
| 9057955 | Functional film, liquid immersion member, method of manufacturing liquid immersion member, exposure apparatus, and device manufacturing method | Yusuke Taki | 2015-06-16 |