Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D1063672 | Laser surveying device | — | 2025-02-25 |
| 10416573 | Holding apparatus, exposure apparatus and manufacturing method of device | — | 2019-09-17 |
| 10185229 | Exposure apparatus, movable body apparatus, and device manufacturing method | — | 2019-01-22 |
| 9798252 | Exposure apparatus, movable body apparatus, and device manufacturing method | — | 2017-10-24 |
| 9746787 | Holding apparatus, exposure apparatus and manufacturing method of device | — | 2017-08-29 |
| 8323855 | Pellicle frame apparatus, mask, exposing method, exposure apparatus, and device fabricating method | Hiromitsu Yoshimoto | 2012-12-04 |