Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9951415 | Film deposition apparatus and film deposition method | Yasuo Murakami, Kazuhiro Hoshino, Toru Sato, Takashi Takemi, Satoshi Nakamura | 2018-04-24 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9951415 | Film deposition apparatus and film deposition method | Yasuo Murakami, Kazuhiro Hoshino, Toru Sato, Takashi Takemi, Satoshi Nakamura | 2018-04-24 |