Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8361876 | Manufacturing method of semiconductor device | Kenji Takeo, Ryo Takahashi | 2013-01-29 |
| 7921386 | Fabrication method for semiconductor device, exposure method, pattern correction method and semiconductor device | — | 2011-04-05 |
| 5825468 | Exposure system for lithography apparatus | — | 1998-10-20 |
| 5574276 | Apparatus and method for detecting a dust particle having high purity inert gas atmosphere | — | 1996-11-12 |
| 5332627 | Field emission type emitter and a method of manufacturing thereof | Hidetoshi Watanabe, Hiroshi Komatsu, Toshiaki Hasegawa | 1994-07-26 |