Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7662721 | Hard mask layer stack and a method of patterning | Dirk Manger, Hocine Boubekeur, Martin Verhoeven, Nicolas Nagel, Dirk Caspary +1 more | 2010-02-16 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7662721 | Hard mask layer stack and a method of patterning | Dirk Manger, Hocine Boubekeur, Martin Verhoeven, Nicolas Nagel, Dirk Caspary +1 more | 2010-02-16 |