Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5776391 | Silicon carbide carrier for wafer processing and method for making same | — | 1998-07-07 |
| 5538230 | Silicon carbide carrier for wafer processing | — | 1996-07-23 |
| 5514439 | Wafer support fixtures for rapid thermal processing | — | 1996-05-07 |
| 5443649 | Silicon carbide carrier for wafer processing in vertical furnaces | — | 1995-08-22 |