| 8010084 |
RF power delivery diagnostic system |
— |
2011-08-30 |
| 7728250 |
RF sensor clamp assembly |
Rodney A. Herman, Duane T. Smith, James D. Spain |
2010-06-01 |
| 7403764 |
RF power delivery diagnostic system |
— |
2008-07-22 |
| 7345428 |
Transducer package for process control |
— |
2008-03-18 |
| 7118992 |
Wafer thinning using magnetic mirror plasma |
James D. Spain, Richard Banks |
2006-10-10 |
| 6794272 |
Wafer thinning using magnetic mirror plasma |
James D. Spain, Richard Banks |
2004-09-21 |
| 5939886 |
Plasma monitoring and control method and system |
James D. Spain, John Swyers |
1999-08-17 |
| 5746835 |
Retractable probe system with in situ fabrication environment process parameter sensing |
James F. Belcher, Gary W. Andrews |
1998-05-05 |
| 5716878 |
Retractable probe system with in situ fabrication environment process parameter sensing |
James F. Belcher, Gary W. Andrews |
1998-02-10 |
| 5576629 |
Plasma monitoring and control method and system |
James D. Spain, John Swyers |
1996-11-19 |