Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12147374 | Distributed control system and semiconductor inspection apparatus including same | Kazushi YAMASHINA, Takashi Saegusa, Yoshiro Gunji, Yutaka Kasai, Junichi Kitamura +3 more | 2024-11-19 |
| 9077264 | Charged particle beam apparatus and electrostatic chuck apparatus | Naoya Ishigaki | 2015-07-07 |