TL

Ta-Yu Lo

Lam Research: 1 patents #1,364 of 2,128Top 65%
Overall (All Time): #2,629,345 of 4,157,543Top 65%
1
Patents All Time

Issued Patents All Time

Patent #TitleCo-InventorsDate
11854792 Systems and methods for preventing stiction of high aspect ratio structures and/or repairing high aspect ratio structures Dries Dictus 2023-12-26