Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10459350 | Linear motor, stage apparatus, and exposure apparatus | Shigeru Morimoto | 2019-10-29 |
| 9804508 | Linear motor, stage apparatus, and exposure apparatus | Shigeru Morimoto | 2017-10-31 |