Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12276907 | Photoresist inspection apparatus, photoresist inspection method using the same, and electron beam exposure apparatus | Johan Hofkens, Haifeng Yuan, Flip de Jong | 2025-04-15 |
| 10056229 | Charged-particle beam exposure method and charged-particle beam correction method | Myoungsoo Lee, Inkyun SHIN | 2018-08-21 |
| 9588415 | Electron beam exposure system and methods of performing exposing and patterning processes using the same | Jin Choi, Sunghoon Park | 2017-03-07 |
| 9323142 | Methods of reducing registration errors of photomasks and photomasks formed using the methods | Jin Sun Karoline Choi, Inkyun SHIN, Jeonghyeon Lee | 2016-04-26 |