SM

Steven E. Monahan

IBM: 3 patents #26,272 of 70,183Top 40%
Overall (All Time): #1,653,114 of 4,157,543Top 40%
3
Patents All Time

Issued Patents All Time

Patent #TitleCo-InventorsDate
5299393 Slurry containment device for polishing semiconductor wafers Willard F. Chandler, LaVerne B. Jacobson, Robert D. Johnson 1994-04-05
5279926 Method and apparatus for removing vapor from a pressurized sprayed liquid in the manufacture of semiconductor integrated circuits Willard F. Chandler, Robert D. Johnson, Ronald Wayne Olson 1994-01-18
4810322 Anode plate for a parallel-plate reactive ion etching reactor George M. Gut 1989-03-07