Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6686558 | Atmospheric pressure inductive plasma apparatus | — | 2004-02-03 |
| 6616985 | Apparatus and method for injecting and modifying gas concentration of a meta-stable or atomic species in a downstream plasma reactor | Ronald A. Powell, Gabriel I. Font-Rodriguez, Emerson Derryck Settles | 2003-09-09 |
| 6553933 | Apparatus for injecting and modifying gas concentration of a meta-stable species in a downstream plasma reactor | Ronald A. Powell, Gabriel I. Font-Rodriguez, Emerson Derryck Settles | 2003-04-29 |
| 6287643 | Apparatus and method for injecting and modifying gas concentration of a meta-stable or atomic species in a downstream plasma reactor | Ronald A. Powell, Gabriel I. Font-Rodriguez, Emerson Derryck Settles | 2001-09-11 |
| 6218640 | Atmospheric pressure inductive plasma apparatus | — | 2001-04-17 |
| 5851294 | Gas injection system for semiconductor processing | Lydia J. Young, Richard H. Matthiesen, Ron van Os | 1998-12-22 |