| 7979811 |
Intermediate layout for resolution enhancement in semiconductor fabrication |
Xin Wang, Hongbo Tang, Meg Hung |
2011-07-12 |
| 7827518 |
Incrementally resolved phase-shift conflicts in layouts for phase-shifted features |
Yao-Ting Wang |
2010-11-02 |
| 7404173 |
Intermediate layout for resolution enhancement in semiconductor fabrication |
Xin Wang, Hongbo Tang, Meg Hung |
2008-07-22 |
| 7337424 |
Flexible shape identification for optical proximity correction in semiconductor fabrication |
Xin Wang, Mark D. Pilloff |
2008-02-26 |
| 7281226 |
Incrementally resolved phase-shift conflicts in layouts for phase-shifted features |
Yao-Ting Wang |
2007-10-09 |
| 7216331 |
Resolving phase-shift conflicts in layouts using weighted links between phase shifters |
Seonghun Cho, Yao-Ting Wang |
2007-05-08 |
| 7100134 |
Method and platform for integrated physical verifications and manufacturing enhancements |
Tsz-Tak Daniel Ho |
2006-08-29 |
| 7085698 |
Method for providing flexible and dynamic reporting capability using simulation tools |
Chi-Ming Tsai |
2006-08-01 |
| 6901575 |
Resolving phase-shift conflicts in layouts using weighted links between phase shifters |
Seonghun Cho, Yao-Ting Wang |
2005-05-31 |
| 6846596 |
Alternating phase shift masking for multiple levels of masking resolution |
— |
2005-01-25 |
| 6698007 |
Method and apparatus for resolving coloring conflicts between phase shifters |
Seonghun Cho, Alexandre Arkhipov, Ilya Grishashvili |
2004-02-24 |
| 6622288 |
Conflict sensitive compaction for resolving phase-shift conflicts in layouts for phase-shifted features |
Yao-Ting Wang, Kent Richardson, Christophe Pierrat, Michael Sanie |
2003-09-16 |
| 6605481 |
Facilitating an adjustable level of phase shifting during an optical lithography process for manufacturing an integrated circuit |
Seonghun Cho, Yu-Yu Chou |
2003-08-12 |
| 6593038 |
Method and apparatus for reducing color conflicts during trim generation for phase shifters |
Seonghun Cho |
2003-07-15 |
| 6584610 |
Incrementally resolved phase-shift conflicts in layouts for phase-shifted features |
Yao-Ting Wang |
2003-06-24 |
| 6569583 |
Method and apparatus for using phase shifter cutbacks to resolve phase shifter conflicts |
Seonghun Cho |
2003-05-27 |