Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11728188 | Semiconductor manufacturing device | Yuji Hashimoto, Hiroaki Yamada | 2023-08-15 |
| 11676828 | Semiconductor manufacturing apparatus and manufacturing method of semiconductor device | Satoshi NAKAOKA | 2023-06-13 |
| 11171020 | Substrate treatment apparatus | Satoshi NAKAOKA, Katsuhiro Sato, Hiroaki ASHIDATE, Yuji Hashimoto | 2021-11-09 |
| 10910236 | Semiconductor manufacturing apparatus and method of manufacturing semiconductor device | Hiroaki Yamada, Yuji Hashimoto | 2021-02-02 |
| 10403524 | Substrate processing device and method of manufacturing semiconductor device | Hiroaki Yamada, Yuya Akeboshi, Katsuhiro Sato | 2019-09-03 |
| 10096486 | Substrate processing apparatus, substrate processing method and substrate processing liquid | Katsuhiro Sato, Hiroaki Yamada | 2018-10-09 |
| 10008400 | Substrate processing device and method of manufacturing semiconductor device | Hiroaki Yamada, Yuya Akeboshi, Katsuhiro Sato | 2018-06-26 |