Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6127629 | Hermetically sealed microelectronic device and method of forming same | Kathirgamasundaram Sooriakumar, Allen H. Meitzler, Russell J. Haeberle | 2000-10-03 |
| 6087937 | Security device | — | 2000-07-11 |
| 5801068 | Hermetically sealed microelectronic device and method of forming same | Kathirgamasundaram Sooriakumar, Allen H. Meitzler, Russell J. Haeberle | 1998-09-01 |
| 5685062 | Self-assembly fabrication method for planar micro-motor | Sickafus Nathan Edward | 1997-11-11 |
| 5317922 | Capacitance transducer article and method of fabrication | John L. Bomback, Ronald Elder | 1994-06-07 |
| 5264075 | Fabrication methods for silicon/glass capacitive absolute pressure sensors | Margherita Zanini-Fisher, Michael H. Parsons, Kathirgamasundaram Sooriakumar, Russell J. Haeberle | 1993-11-23 |
| 5201221 | Flow sensor and method of manufacture | Robert L. Forgacs, John L. Bomback | 1993-04-13 |
| 4776213 | Mass airflow meter | Chester J. Blechinger | 1988-10-11 |
| 4594889 | Mass airflow sensor | — | 1986-06-17 |
| 4561303 | Mass airflow sensor with backflow detection | — | 1985-12-31 |
| 4373145 | Thin film electroluminescent device | John J. Lambe | 1983-02-08 |
| 4359698 | Reflecting type light modulator | John J. Lambe, Henry L. Stadler | 1982-11-16 |
| 4358743 | Light modulator | John J. Lambe, Henry L. Stadler | 1982-11-09 |