Issued Patents All Time
Showing 1–24 of 24 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9419105 | Method for processing substrate and method for fabricating apparatus | — | 2016-08-16 |
| 8663488 | Apparatus for processing substrate and method of doing the same | — | 2014-03-04 |
| 8293128 | Apparatus for processing substrate and method of doing the same | — | 2012-10-23 |
| 7807341 | Method for forming organic mask and method for forming pattern using said organic mask | — | 2010-10-05 |
| 7554164 | Semiconductor device having a gap between a gate electrode and a dummy gate electrode | — | 2009-06-30 |
| 7338911 | Method for etching and for forming a contact hole using thereof | — | 2008-03-04 |
| 7226865 | Process for forming pattern and method for producing liquid crystal display apparatus | — | 2007-06-05 |
| 7214473 | Method for removing patterned layer from lower layer through reflow | — | 2007-05-08 |
| 7060623 | Method of deforming a pattern and semiconductor device formed by utilizing deformed pattern | — | 2006-06-13 |
| 7033951 | Process for forming pattern and method for producing liquid crystal display apparatus | — | 2006-04-25 |
| 7030467 | Method of deforming a pattern and semiconductor device formed by utilizing deformed pattern | — | 2006-04-18 |
| 6977422 | Method of deforming a pattern and semiconductor device formed by utilizing deformed pattern | — | 2005-12-20 |
| 6953976 | Method of deforming a pattern and semiconductor device formed by utilizing deformed pattern | — | 2005-10-11 |
| 6949766 | Method of deforming a pattern and semiconductor device formed by utilizing deformed pattern | — | 2005-09-27 |
| 6890783 | Active matrix substrate plate and manufacturing method therefor | Shigeru Kimura, Takahiko Watanabe, Tae Yoshikawa, Hiroyuki Uchida, Shinichi Nakata +11 more | 2005-05-10 |
| 6791145 | Semiconductor device formed by utilizing deformed pattern | — | 2004-09-14 |
| 6767694 | Process for forming pattern and method for producing liquid crystal apparatus employing process for forming pattern | — | 2004-07-27 |
| 6756187 | Method for removing patterned layer from lower layer through reflow | — | 2004-06-29 |
| 6740596 | Manufacturing method of active matrix substrate | Takasuke Hayase, Hiroaki Tanaka, Toshihiko Harano | 2004-05-25 |
| 6707107 | Method of deforming a pattern and semiconductor device formed by utilizing deformed pattern | — | 2004-03-16 |
| 6670104 | Pattern forming method and method of manufacturing thin film transistor | — | 2003-12-30 |
| 6632696 | Manufacturing method of active matrix substrate plate and manufacturing method therefor | Shigeru Kimura, Takahiko Watanabe, Tae Yoshikawa, Hiroyuki Uchida, Shinichi Nakata +11 more | 2003-10-14 |
| 6617263 | Pattern forming method for flattening an organic film for a liquid crystal display device | — | 2003-09-09 |
| 6380006 | Pattern formation method and method of manufacturing display using it | — | 2002-04-30 |