Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6607991 | Method for curing spin-on dielectric films utilizing electron beam radiation | William R. Livesay, Matthew Ross, Anthony L. Rubiales, Heike Thompson, Trey Marlowe +1 more | 2003-08-19 |
| 6358670 | Enhancement of photoresist plasma etch resistance via electron beam surface cure | Matthew Ross | 2002-03-19 |
| 6340556 | Tailoring of linewidth through electron beam post exposure | — | 2002-01-22 |
| 6319655 | Modification of 193 nm sensitive photoresist materials by electron beam exposure | Matthew Ross | 2001-11-20 |