Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11921421 | Overlay correcting method, and photolithography method, semiconductor device manufacturing method and scanner system based on the overlay correcting method | Jeongjin Lee, Minseok Kang, Chan Hwang | 2024-03-05 |
| 11796923 | Overlay correction method, method of evaluating overlay correction operation, and method of fabricating semiconductor device using the overlay correction method | Hyunjay Kang, Chorong Park, Doogyu Lee, Jeongjin Lee | 2023-10-24 |
| 11537042 | Overlay correcting method, and photolithography method, semiconductor device manufacturing method and scanner system based on the overlay correcting method | Jeongjin Lee, Minseok Kang, Chan Hwang | 2022-12-27 |
| 11526087 | Method of manufacturing a semiconductor device | Jeongjin Lee, Doogyu Lee | 2022-12-13 |
| 11456222 | Overlay correction method and semiconductor fabrication method including the same | Woo Yong Jung, Jinsun KIM, Jeongjin Lee, Chan Hwang | 2022-09-27 |
| 11422455 | EUV exposure apparatus, and overlay correction method and semiconductor device fabricating method using the same | Doogyu Lee, Jeongjin Lee, Chan Hwang | 2022-08-23 |
| 11137673 | EUV exposure apparatus, and overlay correction method and semiconductor device fabricating method using the same | Doogyu Lee, Jeongjin Lee, Chan Hwang | 2021-10-05 |
| 10630332 | Electronic device | Hyunsun Yoo, Minhyuck CHOI, Jaebeom Cho, Joongyeol Ko | 2020-04-21 |
| 10566252 | Overlay-correction method and a control system using the same | Chan Hwang | 2020-02-18 |
| 10439087 | Solar cell | Jungmin Ha, Sangwook Park | 2019-10-08 |
| 10067738 | Device control based on its operational context | Plamen A. Ivanov, Kevin J. Bastyr, Mark A. Jasiuk, John Ross Meloney, Snehitha Singaraju | 2018-09-04 |
| 9747682 | Methods for measuring overlays | Jeongjin Lee, Chan Hwang | 2017-08-29 |
| 9224886 | Silicon thin film solar cell | Suntae Hwang, Sehwon Ahn | 2015-12-29 |
| 8981203 | Thin film solar cell module | Suntae Hwang, Dongjoo You, Sungeun Lee | 2015-03-17 |
| 8222517 | Thin film solar cell | Hyunja Shim, Dongjoo You, Heonmin Lee, Suntae Hwang, Sehwon Ahn +1 more | 2012-07-17 |