SS

Sam X. Sun

BS Brewer Science: 4 patents #36 of 171Top 25%
Overall (All Time): #856,706 of 4,157,543Top 25%
6
Patents All Time

Issued Patents All Time

Patent #TitleCo-InventorsDate
8911932 Photo-imageable hardmask with positive tone for microphotolithography 2014-12-16
8728710 Photo-imageable hardmask with dual tones for microphotolithography 2014-05-20
8415083 On-track process for patterning hardmask by multiple dark field exposures Hao Xu, Tony D. Flaim 2013-04-09
8168372 Method of creating photolithographic structures with developer-trimmed hard mask 2012-05-01
8133659 On-track process for patterning hardmask by multiple dark field exposures Hao Xu, Tony D. Flaim 2012-03-13
7364832 Wet developable hard mask in conjunction with thin photoresist for micro photolithography Chenghong Li 2008-04-29