Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8911932 | Photo-imageable hardmask with positive tone for microphotolithography | — | 2014-12-16 |
| 8728710 | Photo-imageable hardmask with dual tones for microphotolithography | — | 2014-05-20 |
| 8415083 | On-track process for patterning hardmask by multiple dark field exposures | Hao Xu, Tony D. Flaim | 2013-04-09 |
| 8168372 | Method of creating photolithographic structures with developer-trimmed hard mask | — | 2012-05-01 |
| 8133659 | On-track process for patterning hardmask by multiple dark field exposures | Hao Xu, Tony D. Flaim | 2012-03-13 |
| 7364832 | Wet developable hard mask in conjunction with thin photoresist for micro photolithography | Chenghong Li | 2008-04-29 |