Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12106928 | Cathode mechanism of electron emission source, and method for manufacturing cathode mechanism of electron emission source | — | 2024-10-01 |
| 11430628 | Cathode mechanism of electron gun, electron gun, and electron beam writing apparatus | — | 2022-08-30 |
| 9412551 | Cathode obtaining method and electron beam writing apparatus | Kenichi Saito | 2016-08-09 |
| 9299525 | Thermionic cathode with even electric field distribution on electron emitting surface | — | 2016-03-29 |
| 9251990 | Method for producing a thermoelectron emission source and method for producing a cathode | — | 2016-02-02 |