Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10840122 | Teaching method of transfer device | Toshiyuki Kobayashi, Kazuya Koshiishi, Junya Sato, Shun Suto, Toshimitsu Chiba | 2020-11-17 |
| 10128121 | Substrate processing apparatus, substrate processing method and substrate processing program | Mitsuru Sasaki, Tatsuya Miura, Toshihiro OHNO, Kazumune Ono, Shoko ENDO | 2018-11-13 |