Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7564625 | Systems and methods for a scanning boom microscope | Charles S. McLeod, Yunsheng Ma | 2009-07-21 |
| 6845145 | Method of improving x-ray lithography in the sub 100nm range to create high quality semiconductor devices | Franz Rauch, Heinz Siegert, Klaus Simon, William Rudolf Friml, Joe Baker Gagnon +1 more | 2005-01-18 |
| D451937 | Vertical stepper stage apparatus | Franz Rauch | 2001-12-11 |
| 6295332 | Method of improving x-ray lithography in the sub 100nm range to create high quality semiconductor devices | William Rudolf Friml, Joe Baker Gagnon, Robert H. Macklin, Franz Rauch, Heinz Siegert +1 more | 2001-09-25 |