Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9335540 | MEMS device with improved via support planarization | Lucius M. Sherwin, Jose Antonio Martinez, Sean O'Brien | 2016-05-10 |
| 8124321 | Etching method for use in deep-ultraviolet lithography | Georgina Marie Park, Rosemary Urmese Anthraper | 2012-02-28 |
| 8112168 | Process and method for a decoupled multi-parameter run-to-run controller | Madhu Ramavajjala, Kristi Bushman, Robert Ray Spangler, Stephen Arlon Meinser | 2012-02-07 |
| 7622244 | Method for contaminant removal | Erika McFadden, Lisa Wesneski | 2009-11-24 |
| 7430072 | System and method for increasing image quality in a display system | Timothy J. Hogan, Lucius M. Sherwin | 2008-09-30 |
| 6542282 | Post metal etch clean process using soft mask | David Michael Smith, Eric Robert Trumbauer, Brian P. Scott | 2003-04-01 |