Robert F. Edgerton

ED Energy Conversion Devices: 3 patents #65 of 231Top 30%

Overall (All Time): #1,680,055 of 4,157,543Top 45%

Patents All Time

Issued Patents All Time

Patent #	Title	Co-Inventors	Date
4525376	Optical methods for controlling layer thickness	—	1985-06-25
4470369	Apparatus for uniformly heating a substrate	—	1984-09-11
4389970	Apparatus for regulating substrate temperature in a continuous plasma deposition process	—	1983-06-28