Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12313290 | Semiconductor turbine reset | Andrew Lei | 2025-05-27 |
| 11635216 | Semiconductor turbine reset | Andrew Lei | 2023-04-25 |
| 11274671 | Turbine cap for turbo-molecular pump | — | 2022-03-15 |
| 9512848 | Turbine cap for turbo-molecular pump | — | 2016-12-06 |
| 9512853 | Turbine cap for turbo-molecular pump | — | 2016-12-06 |
| 6506312 | Vapor deposition chamber components and methods of making the same | — | 2003-01-14 |
| 6195621 | Non-invasive system and method for diagnosing potential malfunctions of semiconductor equipment components | — | 2001-02-27 |