Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5048966 | Apparatus and system for linewidth measurements | — | 1991-09-17 |
| 4938654 | Automated wafer inspection system | — | 1990-07-03 |
| 4818169 | Automated wafer inspection system | by Gary R. Schram, executor | 1989-04-04 |
| 4385837 | Apparatus and system for linewidth measurements | — | 1983-05-31 |