Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7037184 | Polishing pad for use in chemical-mechanical planarization of semiconductor wafers and method of making same | Angela Petroski, Paul Fathauer, Marc A. Yesnik | 2006-05-02 |
| 7025668 | Gradient polishing pad made from paper-making fibers for use in chemical/mechanical planarization of wafers | Angela Petroski, Paul Fathauer, David Perry | 2006-04-11 |
| 6979256 | Retaining ring with wear pad for use in chemical mechanical planarization | Paul Fathauer, Angela Mroczek-Petroski, David Perry, James Macey | 2005-12-27 |
| 6964601 | Method for securing a polishing pad to a platen for use in chemical-mechanical polishing of wafers | Angela Petroski, Paul Fathauer, David Perry, James Macey | 2005-11-15 |
| 6899610 | Retaining ring with wear pad for use in chemical mechanical planarization | Paul Fathauer, Angela Mroczek-Petroski, David Perry, James Macey | 2005-05-31 |
| 6863774 | Polishing pad for use in chemical-mechanical planarization of semiconductor wafers and method of making same | Paul Fathauer, Angela Mroczek-Petroski, David Perry, James J. Petroski | 2005-03-08 |
| 6852020 | Polishing pad for use in chemical—mechanical planarization of semiconductor wafers and method of making same | Angela Petroski, Paul Fathauer, Marc A. Yesnik | 2005-02-08 |
| 4804466 | Fluid filter with internal spacer | Ojars W. Pincers | 1989-02-14 |