Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8614052 | Method for controlling the electronic beam exposure of wafers and masks using proximity correction | — | 2013-12-24 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8614052 | Method for controlling the electronic beam exposure of wafers and masks using proximity correction | — | 2013-12-24 |