Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7880152 | Device and method for producing resist profiled elements | Wittich Kaule, Ines Stolberg, Andreas Schubert, Marius Dichtl | 2011-02-01 |
| 6774375 | Method and apparatus for forming a curved polyline on a radiation-sensitive resist | Andreas Schubert, Michael Blume, Ines Stolberg | 2004-08-10 |
| 6635884 | Method for directing an electron beam onto a target position on a substrate surface | Ines Stolberg, Michael Blume, Rainer Kaebsch, Matthias Zierbock | 2003-10-21 |