Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8043652 | Method and apparatus for aligning patterns on a substrate | Michael J. Nelson, Igor Touzov | 2011-10-25 |
| 7279046 | Method and apparatus for aligning patterns on a substrate | Michael J. Nelson, Igor Touzov | 2007-10-09 |
| 7060977 | Nanolithographic calibration methods | Sylvain Cruchon Dupeyrat, Mike Nelson | 2006-06-13 |